Description

All lots are processing in FAB in the same time. There are many lots suitable for processing for one equipment at the same point. It is the first priority of engineer to find out which lot is the most urgent/suitable one to increase the throughput.

By using RTD system, engineers could setup RTD rules for each equipment or equipment type: these rules are based on engineers' experience. According to RTD rules, when operator choose one equipment for processing lots, RTD system will sort the available lots by lot's priority order. The highest priority lot is on the top for operator to pick. When every equipment finds its best lot for processing, the whole factory productivity is increasing.

Especially when factory capacity is almost at full condition, RTD could avoid bottleneck equipment and distribute lots for loading balance. In our experience, the factory throughput increase 5~10% when 90% equipment is under RTD control.